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1 Ergebnisse
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Profile, morphology and surface elemental composition of th..:
Zhukov, A. A.
;
Zabotin, Yu. M.
;
Podgorodetsky, S. G.
.
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 11 (2017) 5 - p. 1033-1038 , 2017
Link:
https://doi.org/10.1134/s1027451017050391
RT Journal T1 <Title>Profile, morphology and surface elemental composition of through micro-holes in silicon wafers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1134_s1027451017050391&Exemplar=1&LAN=DE A1 Zhukov, A. A. A1 Zabotin, Yu. M. A1 Podgorodetsky, S. G. A1 Anurov, A. E. PB Pleiades Publishing Ltd YR 2017 SN 1027-4510 SN 1819-7094 JF Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques VO 11 IS 5 SP 1033 OP 1038 LK http://dx.doi.org/https://doi.org/10.1134/s1027451017050391 DO https://doi.org/10.1134/s1027451017050391 SF ELIB - SuUB Bremen
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