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Ion-Track Modification of a Silicon-Dioxide Film Implanted ..:

Privezentsev, V. V. ; Palagushkin, A. N. ; Skuratov, V. A....
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques.  13 (2019)  2 - p. 326-334 , 2019
Link: https://doi.org/10.1134/s102745101902037x