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Mechanical Properties of Thin AlSiN Films, Studied by Nanoi..:

Kuznetsova, T. A. ; Zubar, T. I. ; Lapitskaya, V. A....
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques.  13 (2019)  3 - p. 408-411 , 2019
Link: https://doi.org/10.1134/s102745101903011x