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Study of a SiO2/Si Structure Implanted with 64Zn+ and 16O+ ..:

Privezentsev, V. V. ; Kulikauskas, V. S. ; Zatekin, V. V....
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques.  13 (2019)  3 - p. 382-386 , 2019
Link: https://doi.org/10.1134/s1027451019030169