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On the Prospects of Lithography in the Region of Wavelength..:

Chkhalo, N. I. ; Durov, K. V. ; Nechay, A. N....
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques.  17 (2023)  S1 - p. S226-S232 , 2023
Link: https://doi.org/10.1134/s1027451023070078