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Deposition of TiAlN Thin Films by Magnetron Discharge Plasm:

Fedorov, A. I. ; Yurjev, Yu. N. ; Kazimirov, A. I..
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques.  17 (2023)  S1 - p. S121-S127 , 2023
Link: https://doi.org/10.1134/s1027451023070121