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Reactive Magnetron Sputter Deposition of Titanium Oxynitrid..:

Saoula, N. ; Bait, L. ; Sali, S....
Protection of Metals and Physical Chemistry of Surfaces.  55 (2019)  4 - p. 743-747 , 2019
Link: https://doi.org/10.1134/s207020511904018x