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1 Ergebnisse
1
Self-Separation of a Thick AlN Layer from a Sapphire Substr..:
Kumagai, Yoshinao
;
Tajima, Jumpei
;
Ishizuki, Masanari
...
Applied Physics Express. 1 (2008) - p. 045003 , 2008
Link:
https://doi.org/10.1143/apex.1.045003
RT Journal T1
Self-Separation of a Thick AlN Layer from a Sapphire Substrate via Interfacial Voids Formed by the Decomposition of Sapphire
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_apex.1.045003&Exemplar=1&LAN=DE A1 Kumagai, Yoshinao A1 Tajima, Jumpei A1 Ishizuki, Masanari A1 Nagashima, Toru A1 Murakami, Hisashi A1 Takada, Kazuya A1 Koukitu, Akinori PB IOP Publishing YR 2008 SN 1882-0778 SN 1882-0786 JF Applied Physics Express VO 1 SP 045003 LK http://dx.doi.org/https://doi.org/10.1143/apex.1.045003 DO https://doi.org/10.1143/apex.1.045003 SF ELIB - SuUB Bremen
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