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1 Ergebnisse
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Electron-Beam-Induced Decomposition Mechanisms of High-Sens..:
Oyama, Tomoko Gowa
;
Enomoto, Kazuyuki
;
Hosaka, Yuji
...
Applied Physics Express. 5 (2012) 3 - p. 036501 , 2012
Link:
https://doi.org/10.1143/apex.5.036501
RT Journal T1
Electron-Beam-Induced Decomposition Mechanisms of High-Sensitivity Chlorinated Resist ZEP520A
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_apex.5.036501&Exemplar=1&LAN=DE A1 Oyama, Tomoko Gowa A1 Enomoto, Kazuyuki A1 Hosaka, Yuji A1 Oshima, Akihiro A1 Washio, Masakazu A1 Tagawa, Seiichi PB IOP Publishing YR 2012 SN 1882-0778 SN 1882-0786 JF Applied Physics Express VO 5 IS 3 SP 036501 LK http://dx.doi.org/https://doi.org/10.1143/apex.5.036501 DO https://doi.org/10.1143/apex.5.036501 SF ELIB - SuUB Bremen
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