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Low Temperature Deposition of Oriented C-Axis AlN Films on ..:
Takeda, Fumio
;
Hata, Tomonobu
Japanese Journal of Applied Physics. 19 (1980) 5 - p. 1001 , 1980
Link:
https://doi.org/10.1143/jjap.19.1001
RT Journal T1 <Title>Low Temperature Deposition of Oriented C-Axis AlN Films on Glass Substrates by Reactive Magnetron Sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.19.1001&Exemplar=1&LAN=DE A1 Takeda, Fumio A1 Hata, Tomonobu PB IOP Publishing YR 1980 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 19 IS 5 SP 1001 LK http://dx.doi.org/https://doi.org/10.1143/jjap.19.1001 DO https://doi.org/10.1143/jjap.19.1001 SF ELIB - SuUB Bremen
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