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1 Ergebnisse
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Nanometer Pattern Transfer by VUV Lithography with a D2 Lam:
Mutoh, Katsuhiko
;
Iwabuchi, Takashi
;
Kudo, Kazuhiro
...
Japanese Journal of Applied Physics. 29 (1990) 11R - p. 2559 , 1990
Link:
https://doi.org/10.1143/jjap.29.2559
RT Journal T1
Nanometer Pattern Transfer by VUV Lithography with a D2 Lamp
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.29.2559&Exemplar=1&LAN=DE A1 Mutoh, Katsuhiko A1 Iwabuchi, Takashi A1 Kudo, Kazuhiro A1 Watanabe, Hisashi A1 Todokoro, Yoshihiro A1 Miyata, Takeo A1 Sano, Reiji PB IOP Publishing YR 1990 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 29 IS 11R SP 2559 LK http://dx.doi.org/https://doi.org/10.1143/jjap.29.2559 DO https://doi.org/10.1143/jjap.29.2559 SF ELIB - SuUB Bremen
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