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1 Ergebnisse
1
Optimally Stable Electron Cyclotron Resonance Plasma Genera..:
Samukawa, Seiji
;
Nakamura, Tsuyoshi
;
Ishida, Toshinori
.
Japanese Journal of Applied Physics. 31 (1992) 12S - p. 4348 , 1992
Link:
https://doi.org/10.1143/jjap.31.4348
RT Journal T1
Optimally Stable Electron Cyclotron Resonance Plasma Generation and Essential Points for Compact Plasma Source
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.31.4348&Exemplar=1&LAN=DE A1 Samukawa, Seiji A1 Nakamura, Tsuyoshi A1 Ishida, Toshinori A1 Ishitani, Akihiko PB IOP Publishing YR 1992 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 31 IS 12S SP 4348 LK http://dx.doi.org/https://doi.org/10.1143/jjap.31.4348 DO https://doi.org/10.1143/jjap.31.4348 SF ELIB - SuUB Bremen
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