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1 Ergebnisse
1
Electron Energy Distribution Detection in Symmetrically Dri..:
Takashi Kimura, Takashi Kimura
;
Kazuyuki Ohe, Kazuyuki Ohe
Japanese Journal of Applied Physics. 32 (1993) 8R - p. 3601 , 1993
Link:
https://doi.org/10.1143/jjap.32.3601
RT Journal T1
Electron Energy Distribution Detection in Symmetrically Driven RF Argon Discharge
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.32.3601&Exemplar=1&LAN=DE A1 Takashi Kimura, Takashi Kimura A1 Kazuyuki Ohe, Kazuyuki Ohe PB IOP Publishing YR 1993 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 32 IS 8R SP 3601 LK http://dx.doi.org/https://doi.org/10.1143/jjap.32.3601 DO https://doi.org/10.1143/jjap.32.3601 SF ELIB - SuUB Bremen
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