I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Electron Beam Block Exposure System for 256 M Dynamic Rando..:
Sakamoto, Kiichi
;
Fueki, Shunsuke
;
Yamazaki, Satoru
...
Japanese Journal of Applied Physics. 32 (1993) 12S - p. 6006 , 1993
Link:
https://doi.org/10.1143/jjap.32.6006
RT Journal T1
Electron Beam Block Exposure System for 256 M Dynamic Random AccessMemory Lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.32.6006&Exemplar=1&LAN=DE A1 Sakamoto, Kiichi A1 Fueki, Shunsuke A1 Yamazaki, Satoru A1 Abe, Tomohiko A1 Kobayashi, Katsuhiko A1 Nishino, Hisayasu A1 Satoh, Takamasa A1 Takemoto, Akio A1 Ookura, Akio A1 Ohno, Manabu A1 Sagoh, Satoru A1 Oae, Yoshihisa A1 Yamada, Akio A1 Junichi Kai, Junichi Kai A1 Hiroshi Yasuda, Hiroshi Yasuda PB IOP Publishing YR 1993 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 32 IS 12S SP 6006 LK http://dx.doi.org/https://doi.org/10.1143/jjap.32.6006 DO https://doi.org/10.1143/jjap.32.6006 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)