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1 Ergebnisse
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Silicon Surface Imperfection Probed with a Novel X-Ray Diff..:
Kitano, Tomohisa
;
Hasegawa, Eiji
;
Tsukiji, Masaru
...
Japanese Journal of Applied Physics. 32 (1993) 11A - p. L1581 , 1993
Link:
https://doi.org/10.1143/jjap.32.l1581
RT Journal T1
Silicon Surface Imperfection Probed with a Novel X-Ray Diffraction Technique and Its Influence on the Reliability of Thermally Grown Silicon Oxide
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.32.l1581&Exemplar=1&LAN=DE A1 Kitano, Tomohisa A1 Hasegawa, Eiji A1 Tsukiji, Masaru A1 Akimoto, Koichi A1 Kimura, Shigeru A1 Shuichi Saito, Shuichi Saito A1 Kazuko Ikeda, Kazuko Ikeda PB IOP Publishing YR 1993 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 32 IS 11A SP L1581 LK http://dx.doi.org/https://doi.org/10.1143/jjap.32.l1581 DO https://doi.org/10.1143/jjap.32.l1581 SF ELIB - SuUB Bremen
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