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1 Ergebnisse
1
Electron Cyclotron Resonance Discharge of Sublimation Gas o..:
Yoshifumi Ito, Yoshifumi Ito
;
Naoki Kanazawa, Naoki Kanazawa
;
Takashi Arakawa, Takashi Arakawa
..
Japanese Journal of Applied Physics. 33 (1994) 7S - p. 4251 , 1994
Link:
https://doi.org/10.1143/jjap.33.4251
RT Journal T1
Electron Cyclotron Resonance Discharge of Sublimation Gas of Decaborane and Its Application to Preparation of Boron Thin Films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.33.4251&Exemplar=1&LAN=DE A1 Yoshifumi Ito, Yoshifumi Ito A1 Naoki Kanazawa, Naoki Kanazawa A1 Takashi Arakawa, Takashi Arakawa A1 Masahiro Saidoh, Masahiro Saidoh A1 Masahiro Nishikawa, Masahiro Nishikawa PB IOP Publishing YR 1994 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 33 IS 7S SP 4251 LK http://dx.doi.org/https://doi.org/10.1143/jjap.33.4251 DO https://doi.org/10.1143/jjap.33.4251 SF ELIB - SuUB Bremen
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