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1 Ergebnisse
1
CF3, CF2and CF Radical Measurements in RF CHF3Etching Plasm..:
Koji Maruyama, Koji Maruyama
;
Katsunori Ohkouchi, Katsunori Ohkouchi
;
Yasunori Ohtsu, Yasunori Ohtsu
.
Japanese Journal of Applied Physics. 33 (1994) 7S - p. 4298 , 1994
Link:
https://doi.org/10.1143/jjap.33.4298
RT Journal T1
CF3, CF2and CF Radical Measurements in RF CHF3Etching Plasma Using Infrared Diode Laser Absorption Spectroscopy
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.33.4298&Exemplar=1&LAN=DE A1 Koji Maruyama, Koji Maruyama A1 Katsunori Ohkouchi, Katsunori Ohkouchi A1 Yasunori Ohtsu, Yasunori Ohtsu A1 Toshio Goto, Toshio Goto PB IOP Publishing YR 1994 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 33 IS 7S SP 4298 LK http://dx.doi.org/https://doi.org/10.1143/jjap.33.4298 DO https://doi.org/10.1143/jjap.33.4298 SF ELIB - SuUB Bremen
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