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1 Ergebnisse
1
Long Electron Cyclotron Resonance Plasma Source for Reactiv..:
Toshiaki Yasui, Toshiaki Yasui
;
Kiyotaka Nakase, Kiyotaka Nakase
;
Hirokazu Tahara, Hirokazu Tahara
.
Japanese Journal of Applied Physics. 35 (1996) 10R - p. 5495 , 1996
Link:
https://doi.org/10.1143/jjap.35.5495
RT Journal T1
Long Electron Cyclotron Resonance Plasma Source for Reactive Sputtering
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.35.5495&Exemplar=1&LAN=DE A1 Toshiaki Yasui, Toshiaki Yasui A1 Kiyotaka Nakase, Kiyotaka Nakase A1 Hirokazu Tahara, Hirokazu Tahara A1 Takao Yoshikawa, Takao Yoshikawa PB IOP Publishing YR 1996 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 35 IS 10R SP 5495 LK http://dx.doi.org/https://doi.org/10.1143/jjap.35.5495 DO https://doi.org/10.1143/jjap.35.5495 SF ELIB - SuUB Bremen
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