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1 Ergebnisse
1
Reduction of Selectivity Loss Probability on Dielectric Sur..:
Chang, Kow Ming
;
Wang, Shih Wei
;
Li, Chii Horng
..
Japanese Journal of Applied Physics. 35 (1996) 12S - p. 6555 , 1996
Link:
https://doi.org/10.1143/jjap.35.6555
RT Journal T1
Reduction of Selectivity Loss Probability on Dielectric Surface during Chemical Vapor Deposition of Tungsten Using Fluorinated Oxide and Removing Silanol Units on Dielectric Surface
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.35.6555&Exemplar=1&LAN=DE A1 Chang, Kow Ming A1 Wang, Shih Wei A1 Li, Chii Horng A1 Jung Yu Tsai, Jung Yu Tsai A1 Ta Hsun Yeh, Ta Hsun Yeh PB IOP Publishing YR 1996 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 35 IS 12S SP 6555 LK http://dx.doi.org/https://doi.org/10.1143/jjap.35.6555 DO https://doi.org/10.1143/jjap.35.6555 SF ELIB - SuUB Bremen
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