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1 Ergebnisse
1
Effect of Degree of Coherence in Optical Lithography Using ..:
Donggyu Yim, Donggyu Yim
;
Seonbok Lee, Seonbok Lee
;
Sungmuk Lee, Sungmuk Lee
...
Japanese Journal of Applied Physics. 35 (1996) 2R - p. 780 , 1996
Link:
https://doi.org/10.1143/jjap.35.780
RT Journal T1
Effect of Degree of Coherence in Optical Lithography Using Dummy Diffraction Mask
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.35.780&Exemplar=1&LAN=DE A1 Donggyu Yim, Donggyu Yim A1 Seonbok Lee, Seonbok Lee A1 Sungmuk Lee, Sungmuk Lee A1 Yong Ho Oh, Yong Ho Oh A1 Hai Bin Chung, Hai Bin Chung A1 Hyung Joun Yoo, Hyung Joun Yoo PB IOP Publishing YR 1996 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 35 IS 2R SP 780 LK http://dx.doi.org/https://doi.org/10.1143/jjap.35.780 DO https://doi.org/10.1143/jjap.35.780 SF ELIB - SuUB Bremen
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