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1 Ergebnisse
1
Pressure Dependences of Electron Energy Distribution andPow..:
Takashi Kimura, Takashi Kimura
;
Kazuyuki Ohe, Kazuyuki Ohe
Japanese Journal of Applied Physics. 36 (1997) 3R - p. 1274 , 1997
Link:
https://doi.org/10.1143/jjap.36.1274
RT Journal T1
Pressure Dependences of Electron Energy Distribution andPower Dissipationin Symmetrical RF Discharges of Inert Gases
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.36.1274&Exemplar=1&LAN=DE A1 Takashi Kimura, Takashi Kimura A1 Kazuyuki Ohe, Kazuyuki Ohe PB IOP Publishing YR 1997 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 36 IS 3R SP 1274 LK http://dx.doi.org/https://doi.org/10.1143/jjap.36.1274 DO https://doi.org/10.1143/jjap.36.1274 SF ELIB - SuUB Bremen
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