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1 Ergebnisse
1
Characterization and Removal of Trace Heavy Metal Contamina..:
Lee, Chun Su
;
Kang, Seung Youl
;
Woo, Seong Ihl
..
Japanese Journal of Applied Physics. 36 (1997) 4R - p. 2096 , 1997
Link:
https://doi.org/10.1143/jjap.36.2096
RT Journal T1
Characterization and Removal of Trace Heavy Metal Contaminationon Si-Surface Resultedfrom CHF3/C2F6 Reactive Ion Etching
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.36.2096&Exemplar=1&LAN=DE A1 Lee, Chun Su A1 Kang, Seung Youl A1 Woo, Seong Ihl A1 Jong Tae Baek, Jong Tae Baek A1 Hyung Joun Yoo, Hyung Joun Yoo PB IOP Publishing YR 1997 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 36 IS 4R SP 2096 LK http://dx.doi.org/https://doi.org/10.1143/jjap.36.2096 DO https://doi.org/10.1143/jjap.36.2096 SF ELIB - SuUB Bremen
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