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1 Ergebnisse
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Photoreflectance and C-V Measurement Investigations of Dry ..:
Chi-Wein Kuo, Chi-Wein Kuo
;
Yan-Kuin Su, Yan-Kuin Su
Japanese Journal of Applied Physics. 36 (1997) 12B - p. L1651 , 1997
Link:
https://doi.org/10.1143/jjap.36.l1651
RT Journal T1
Photoreflectance and C-V Measurement Investigations of Dry Etched Gate Recesses for GaInP/InGaAs/GaAs Pseudomorphic High Electron Mobility Transistors (HEMTs) Using BCl3/Ar Plasma
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.36.l1651&Exemplar=1&LAN=DE A1 Chi-Wein Kuo, Chi-Wein Kuo A1 Yan-Kuin Su, Yan-Kuin Su PB IOP Publishing YR 1997 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 36 IS 12B SP L1651 LK http://dx.doi.org/https://doi.org/10.1143/jjap.36.l1651 DO https://doi.org/10.1143/jjap.36.l1651 SF ELIB - SuUB Bremen
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