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1 Ergebnisse
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Epitaxial Growth of the GaN Film by Remote-Plasma Metalorga..:
Lai, Wei-Chi
;
Chang, Chun-Yen
;
Yokoyama, Meiso
...
Japanese Journal of Applied Physics. 37 (1998) 10R - p. 5465 , 1998
Link:
https://doi.org/10.1143/jjap.37.5465
RT Journal T1
Epitaxial Growth of the GaN Film by Remote-Plasma Metalorganic Chemical Vapor Deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.37.5465&Exemplar=1&LAN=DE A1 Lai, Wei-Chi A1 Chang, Chun-Yen A1 Yokoyama, Meiso A1 Guo, Jen-Dar A1 Tsang, Jian-Shihn A1 Chan, Shih-Hsiung A1 Bow, Jong-Shing A1 Wei, Sun-Chin A1 Hong, Ray-Hua A1 Sze, Simon M. PB IOP Publishing YR 1998 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 37 IS 10R SP 5465 LK http://dx.doi.org/https://doi.org/10.1143/jjap.37.5465 DO https://doi.org/10.1143/jjap.37.5465 SF ELIB - SuUB Bremen
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