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Study of Electron Energy Distribution Functions (EEDFs) in ..:
Antonova, Tatjana
;
Bougrov, Gleb
;
Bougrova, Antonina
...
Japanese Journal of Applied Physics. 37 (1998) 12S - p. 6906 , 1998
Link:
https://doi.org/10.1143/jjap.37.6906
RT Journal T1
Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.37.6906&Exemplar=1&LAN=DE A1 Antonova, Tatjana A1 Bougrov, Gleb A1 Bougrova, Antonina A1 Choi, Won-Kook A1 Goncharov, Leonid A1 Jung, Hyung-Jin A1 Koh, Seoh-Keun A1 Kondranin, Sergey A1 Kralkina, Elena A1 Sitin, Evgeniy A1 Obukhov, Vladimir PB IOP Publishing YR 1998 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 37 IS 12S SP 6906 LK http://dx.doi.org/https://doi.org/10.1143/jjap.37.6906 DO https://doi.org/10.1143/jjap.37.6906 SF ELIB - SuUB Bremen
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