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1 Ergebnisse
1
Effects of Etch-Induced Damage and Contamination on the Phy..:
Hyeon-Soo Kim, Hyeon-Soo Kim
;
Jong-Ku Yoon, Jong-Ku Yoon
;
Young-Hyuk Lee, Young-Hyuk Lee
...
Japanese Journal of Applied Physics. 38 (1999) 10R - p. 5788 , 1999
Link:
https://doi.org/10.1143/jjap.38.5788
RT Journal T1
Effects of Etch-Induced Damage and Contamination on the Physical and Electrical Properties of Cobalt Silicides
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.38.5788&Exemplar=1&LAN=DE A1 Hyeon-Soo Kim, Hyeon-Soo Kim A1 Jong-Ku Yoon, Jong-Ku Yoon A1 Young-Hyuk Lee, Young-Hyuk Lee A1 Young-Wook Ko, Young-Wook Ko A1 Jong-Wan Park, Jong-Wan Park A1 Geun-Young Yeom, Geun-Young Yeom PB IOP Publishing YR 1999 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 38 IS 10R SP 5788 LK http://dx.doi.org/https://doi.org/10.1143/jjap.38.5788 DO https://doi.org/10.1143/jjap.38.5788 SF ELIB - SuUB Bremen
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