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1 Ergebnisse
1
Lithography Simulator for Electon Beam/Deep UV Intra-Level ..:
Ryoichi Inanami, Ryoichi Inanami
;
Tetsuro Nakasugi, Tetsuro Nakasugi
;
Shinji Sato, Shinji Sato
...
Japanese Journal of Applied Physics. 38 (1999) 12S - p. 7035 , 1999
Link:
https://doi.org/10.1143/jjap.38.7035
RT Journal T1
Lithography Simulator for Electon Beam/Deep UV Intra-Level Mix & Match
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.38.7035&Exemplar=1&LAN=DE A1 Ryoichi Inanami, Ryoichi Inanami A1 Tetsuro Nakasugi, Tetsuro Nakasugi A1 Shinji Sato, Shinji Sato A1 Shoji Mimotogi, Shoji Mimotogi A1 Satoshi Tanaka, Satoshi Tanaka A1 Kazuyoshi Sugihara, Kazuyoshi Sugihara PB IOP Publishing YR 1999 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 38 IS 12S SP 7035 LK http://dx.doi.org/https://doi.org/10.1143/jjap.38.7035 DO https://doi.org/10.1143/jjap.38.7035 SF ELIB - SuUB Bremen
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