I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Integration of Chemical Vapor Deposition Aluminum and Physi..:
Kim, Won-Jun Lee
;
Lee, Sang Yeop Han
;
Kim, Jun Ki
.
Japanese Journal of Applied Physics. 39 (2000) 4R - p. 1694 , 2000
Link:
https://doi.org/10.1143/jjap.39.1694
RT Journal T1
Integration of Chemical Vapor Deposition Aluminum and Physical Vapor Deposition Aluminum for Aluminum Plug Process of Sub-Quarter Micron Devices
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.39.1694&Exemplar=1&LAN=DE A1 Kim, Won-Jun Lee A1 Lee, Sang Yeop Han A1 Kim, Jun Ki A1 Park, Jin Won PB IOP Publishing YR 2000 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 39 IS 4R SP 1694 LK http://dx.doi.org/https://doi.org/10.1143/jjap.39.1694 DO https://doi.org/10.1143/jjap.39.1694 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)