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1 Ergebnisse
1
Optimum Conditions for Novel One-Step Cleaning Method for P..:
Pan, Tung Ming
;
Lei, Tan Fu
;
Chao, Tien Sheng
..
Japanese Journal of Applied Physics. 39 (2000) 10R - p. 5805 , 2000
Link:
https://doi.org/10.1143/jjap.39.5805
RT Journal T1
Optimum Conditions for Novel One-Step Cleaning Method for Pre-Gate Oxide CleaningUsing Robust Design Methodology
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.39.5805&Exemplar=1&LAN=DE A1 Pan, Tung Ming A1 Lei, Tan Fu A1 Chao, Tien Sheng A1 Liaw, Ming Chi A1 Lu, Chih Peng PB IOP Publishing YR 2000 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 39 IS 10R SP 5805 LK http://dx.doi.org/https://doi.org/10.1143/jjap.39.5805 DO https://doi.org/10.1143/jjap.39.5805 SF ELIB - SuUB Bremen
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