I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Intra-Level Mix-and-Match Lithography Process for Fabricati..:
Mitsuru Narihiro, Mitsuru Narihiro
;
Hitoshi Wakabayashi, Hitoshi Wakabayashi
;
Makoto Ueki, Makoto Ueki
...
Japanese Journal of Applied Physics. 39 (2000) 12S - p. 6843 , 2000
Link:
https://doi.org/10.1143/jjap.39.6843
RT Journal T1
Intra-Level Mix-and-Match Lithography Process for Fabricating Sub-100-nm ComplementaryMetal-Oxide-Semiconductor Devices using the JBX-9300FS Point-Electron-Beam System
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.39.6843&Exemplar=1&LAN=DE A1 Mitsuru Narihiro, Mitsuru Narihiro A1 Hitoshi Wakabayashi, Hitoshi Wakabayashi A1 Makoto Ueki, Makoto Ueki A1 Kohichi Arai, Kohichi Arai A1 Takashi Ogura, Takashi Ogura A1 Yukinori Ochiai, Yukinori Ochiai A1 Tohru Mogami, Tohru Mogami PB IOP Publishing YR 2000 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 39 IS 12S SP 6843 LK http://dx.doi.org/https://doi.org/10.1143/jjap.39.6843 DO https://doi.org/10.1143/jjap.39.6843 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)