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1 Ergebnisse
1
Sub-100-nm Device Fabrication using Proximity X-Ray Lithogr..:
Iba, Yoshihisa
;
Taguchi, Takao
;
Kumasaka, Fumiaki
...
Japanese Journal of Applied Physics. 39 (2000) 12S - p. 6952 , 2000
Link:
https://doi.org/10.1143/jjap.39.6952
RT Journal T1
Sub-100-nm Device Fabrication using Proximity X-Ray Lithography at Five Levels
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.39.6952&Exemplar=1&LAN=DE A1 Iba, Yoshihisa A1 Taguchi, Takao A1 Kumasaka, Fumiaki A1 Iizuka, Takashi A1 Sambonsugi, Yasuhiro A1 Aoyama, Hajime A1 Deguchi, Kimiyoshi A1 Fukuda, Makoto A1 Oda, Masatoshi A1 Morita, Hirofumi A1 Matsuda, Tadahito A1 Horiuchi, Kei A1 Matsui, Yasuji PB IOP Publishing YR 2000 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 39 IS 12S SP 6952 LK http://dx.doi.org/https://doi.org/10.1143/jjap.39.6952 DO https://doi.org/10.1143/jjap.39.6952 SF ELIB - SuUB Bremen
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