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1 Ergebnisse
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Low Temperature Growth of Polycrystalline Silicon Films by ..:
Wong, Te-Chi
;
Wu, Jih-Jen
Japanese Journal of Applied Physics. 40 (2001) 11B - p. L1207 , 2001
Link:
https://doi.org/10.1143/jjap.40.l1207
RT Journal T1 <Title>Low Temperature Growth of Polycrystalline Silicon Films by Hot-Wire Chemical Vapor Deposition Using SiCl4/H2 Gases</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.40.l1207&Exemplar=1&LAN=DE A1 Wong, Te-Chi A1 Wu, Jih-Jen PB IOP Publishing YR 2001 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 40 IS 11B SP L1207 LK http://dx.doi.org/https://doi.org/10.1143/jjap.40.l1207 DO https://doi.org/10.1143/jjap.40.l1207 SF ELIB - SuUB Bremen
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