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Observation of Micro-Oxygen Precipitates in the Vicinityof ..:
Kim, Hyun-Soo
;
Lee, Ki-Sang
;
Lee, Bo-Young
...
Japanese Journal of Applied Physics. 40 (2001) 12A - p. L1286 , 2001
Link:
https://doi.org/10.1143/jjap.40.l1286
RT Journal T1 <Title>Observation of Micro-Oxygen Precipitates in the Vicinityof the Oxidation-Induced Stacking Fault Ringand Their Effects on Thin Gate Oxide Breakdown</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.40.l1286&Exemplar=1&LAN=DE A1 Kim, Hyun-Soo A1 Lee, Ki-Sang A1 Lee, Bo-Young A1 Yoo, Hak-Do A1 Pyi, Seung-Ho A1 Koh, Chung-Geun A1 Hong, Byung-Sub A1 Kim, Yil-Wook PB IOP Publishing YR 2001 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 40 IS 12A SP L1286 LK http://dx.doi.org/https://doi.org/10.1143/jjap.40.l1286 DO https://doi.org/10.1143/jjap.40.l1286 SF ELIB - SuUB Bremen
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