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High Capacitance Density in a Ta2O5Folded Capacitor Chip:

Houng, Mau-Phon ; Wang, Yeong-Her ; Horng, Jui-Hong.
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 3A - p. 1311-1314 , 2002
Link: https://doi.org/10.1143/jjap.41.1311