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Thin Oxides Grown on Disilane-Based Polysilicon:

Lee, Jam Wem ; Lei, Tan Fu ; Lee, Chung-Len
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 6A - p. 3651-3654 , 2002
Link: https://doi.org/10.1143/jjap.41.3651