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Measurement of Electron Density of Reactive Plasma Using a ..:
Kanoh, Masaaki
;
Tonotani, Junichi
;
Aoki, Katsuaki
.
Japanese Journal of Applied Physics. 41 (2002) Part 1, No. 6A - p. 3963-3964 , 2002
Link:
https://doi.org/10.1143/jjap.41.3963
RT Journal T1 <Title>Measurement of Electron Density of Reactive Plasma Using a Plasma Oscillation Method</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.41.3963&Exemplar=1&LAN=DE A1 Kanoh, Masaaki A1 Tonotani, Junichi A1 Aoki, Katsuaki A1 Yamage, Masashi PB IOP Publishing YR 2002 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 41 IS Part 1, No. 6A SP 3963 OP 3964 LK http://dx.doi.org/https://doi.org/10.1143/jjap.41.3963 DO https://doi.org/10.1143/jjap.41.3963 SF ELIB - SuUB Bremen
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