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High-Power Compact Laser-Plasma Source for X-ray Lithograph:

Gaeta, Celestino J. ; Rieger, Harry ; Turcu, I. C. Edmond...
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 6B - p. 4111-4121 , 2002
Link: https://doi.org/10.1143/jjap.41.4111