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Influence of Silicon on Insulator Wafer Stress Properties o..:

Kamm, Frank-Michael ; Ehrmann, Albrecht ; Schäfer, Herbert...
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 6B - p. 4146-4149 , 2002
Link: https://doi.org/10.1143/jjap.41.4146