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Fabrication Process of Fine Electrodes Using Shadow Mask Ev..:

Akai, Tomonori ; Abe, Takumi ; Ishibashi, Masayoshi...
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 7B - p. 4883-4886 , 2002
Link: https://doi.org/10.1143/jjap.41.4883