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Studies of a Reactive Sputter Ion Plating for Preparation o..:

Sung, Youl-Moon ; Otsubo, Masahisa ; Honda, Chikahisa.
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 11A - p. 6563-6569 , 2002
Link: https://doi.org/10.1143/jjap.41.6563