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1 Ergebnisse
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ZETA Potential Induced Particle Generation in SC2 Cleaning:
Mun, Seong Yeol
;
Yoon, Ki Chae
;
An, Byeong Woo
Japanese Journal of Applied Physics. 41 (2002) Part 1, No. 12 - p. 7529-7531 , 2002
Link:
https://doi.org/10.1143/jjap.41.7529
RT Journal T1 <Title>ZETA Potential Induced Particle Generation in SC2 Cleaning</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.41.7529&Exemplar=1&LAN=DE A1 Mun, Seong Yeol A1 Yoon, Ki Chae A1 An, Byeong Woo PB IOP Publishing YR 2002 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 41 IS Part 1, No. 12 SP 7529 OP 7531 LK http://dx.doi.org/https://doi.org/10.1143/jjap.41.7529 DO https://doi.org/10.1143/jjap.41.7529 SF ELIB - SuUB Bremen
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