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Fabrication and Characterization of Ru Thin Films Prepared ..:
Kim, Kyoung-Won
;
Kim, Nam-Soo
;
Kim, Yeong-Seuk
...
Japanese Journal of Applied Physics. 41 (2002) Part 1, No. 2A - p. 820-825 , 2002
Link:
https://doi.org/10.1143/jjap.41.820
RT Journal T1
Fabrication and Characterization of Ru Thin Films Prepared by Liquid Delivery Metal-Organic Chemical Vapor Deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.41.820&Exemplar=1&LAN=DE A1 Kim, Kyoung-Won A1 Kim, Nam-Soo A1 Kim, Yeong-Seuk A1 Choi, Il-Sang A1 Kim, Ho-Joung A1 Park, Ju-Chul A1 Lee, Soun-Young PB IOP Publishing YR 2002 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 41 IS Part 1, No. 2A SP 820 OP 825 LK http://dx.doi.org/https://doi.org/10.1143/jjap.41.820 DO https://doi.org/10.1143/jjap.41.820 SF ELIB - SuUB Bremen
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