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Fabrication and Characterization of Ru Thin Films Prepared ..:

Kim, Kyoung-Won ; Kim, Nam-Soo ; Kim, Yeong-Seuk...
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 2A - p. 820-825 , 2002
Link: https://doi.org/10.1143/jjap.41.820