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Effects of the Physical Characteristics of Cerium Oxide on ..:
Kim, Sang-Kyun
;
Paik, Ungyu
;
Oh, Seong-Geun
...
Japanese Journal of Applied Physics. 42 (2003) Part 1, No. 3 - p. 1227-1230 , 2003
Link:
https://doi.org/10.1143/jjap.42.1227
RT Journal T1
Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.42.1227&Exemplar=1&LAN=DE A1 Kim, Sang-Kyun A1 Paik, Ungyu A1 Oh, Seong-Geun A1 Park, Yong-Kook A1 Katoh, Takeo A1 Park, Jea-Gun PB IOP Publishing YR 2003 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 42 IS Part 1, No. 3 SP 1227 OP 1230 LK http://dx.doi.org/https://doi.org/10.1143/jjap.42.1227 DO https://doi.org/10.1143/jjap.42.1227 SF ELIB - SuUB Bremen
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