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1 Ergebnisse
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Warming Potential Reduction of C4F8Using Inductively Couple..:
Raju, Ramasamy
;
Kudo, Daisuke
;
Kubo, Yuya
..
Japanese Journal of Applied Physics. 42 (2003) Part 1, No. 1 - p. 280-285 , 2003
Link:
https://doi.org/10.1143/jjap.42.280
RT Journal T1 <Title>Warming Potential Reduction of C4F8Using Inductively Coupled Plasma</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.42.280&Exemplar=1&LAN=DE A1 Raju, Ramasamy A1 Kudo, Daisuke A1 Kubo, Yuya A1 Inaba, Tsuginori A1 Shindo, Haruo PB IOP Publishing YR 2003 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 42 IS Part 1, No. 1 SP 280 OP 285 LK http://dx.doi.org/https://doi.org/10.1143/jjap.42.280 DO https://doi.org/10.1143/jjap.42.280 SF ELIB - SuUB Bremen
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