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157-nm Single-Layer Resists Based on Main-Chain-Fluorinated..:

Irie, Shigeo ; Ishikawa, Seiichi ; Hagiwara, Takuya...
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 6B - p. 3743-3747 , 2003
Link: https://doi.org/10.1143/jjap.42.3743