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Isotropic/Anisotropic Selective Epitaxial Growth of Si on L..:

Lim, Seung-Hyun ; Song, Sukchan ; Park, Tai-su...
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 6B - p. 3966-3970 , 2003
Link: https://doi.org/10.1143/jjap.42.3966