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Surface Reaction Kinetics in Metalorganic Vapor Phase Epita..:

Oh, Ho-jin ; Sugiyama, Masakazu ; Nakano, Yoshiaki.
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 10 - p. 6284-6291 , 2003
Link: https://doi.org/10.1143/jjap.42.6284