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1 Ergebnisse
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Effects of the Microstructure of Platinum Electrode on the ..:
Lee, Dong-Su
;
Woo, Hyun-Jung
;
Park, Dong-Yeon
...
Japanese Journal of Applied Physics. 42 (2003) Part 1, No. 2A - p. 630-633 , 2003
Link:
https://doi.org/10.1143/jjap.42.630
RT Journal T1 <Title>Effects of the Microstructure of Platinum Electrode on the Oxidation Behavior of TiN Diffusion Barrier Layer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.42.630&Exemplar=1&LAN=DE A1 Lee, Dong-Su A1 Woo, Hyun-Jung A1 Park, Dong-Yeon A1 Ha, Jowoong A1 Hwang, Cheol Seong A1 Yoon, Euijoon PB IOP Publishing YR 2003 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 42 IS Part 1, No. 2A SP 630 OP 633 LK http://dx.doi.org/https://doi.org/10.1143/jjap.42.630 DO https://doi.org/10.1143/jjap.42.630 SF ELIB - SuUB Bremen
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