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Excimer Laser Annealing with a Line Beam for Improvement of..:

Kim, Dae-Jin ; Park, Seong-Eun ; Kim, Hyun-Jung...
Japanese Journal of Applied Physics.  42 (2003)  Part 1, No. 12 - p. 7349-7353 , 2003
Link: https://doi.org/10.1143/jjap.42.7349