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Defect Detection in Silicon Wafer by Photoacoustic Imaging:

Berquez, Laurent ; Marty-Dessus, Didier ; Franceschi, Jean L.
Japanese Journal of Applied Physics.  42 (2003)  Part 2, No. 10A - p. L1198-L1200 , 2003
Link: https://doi.org/10.1143/jjap.42.l1198